Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

By: Material type: TextTextPublication details: Boca Raton, FL : CRC Press, c2012.Edition: 3rd edDescription: 3 v. : ill. (some col.) ; 29 cmISBN:
  • 9781420055115 (v. 1)
  • 1420055119 (v. 1)
  • 9781420055191 (v. 2)
  • 1420055194 (v. 2)
  • 9781420055160 (v. 3)
  • 142005516X (v. 3)
Other title:
  • Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Subject(s): DDC classification:
  • 620/.5 23
LOC classification:
  • TK7875 .M33 2012
Other classification:
  • TEC027000 | TEC008070 | SCI077000
Online resources:
Contents:
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
Summary: "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--Summary: "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
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Item type Current library Call number Copy number Status Date due Barcode
General Books General Books CUTN Central Library Medicine, Technology & Management 620/.5 (Browse shelf(Opens below)) 1 Available 10432

Includes bibliographical references and index.

v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.

"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--

"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--

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