Amazon cover image
Image from Amazon.com
Image from Google Jackets

Ceramic thick films for MEMS and microdevices [electronic resource] / Robert A. Dorey.

By: Contributor(s): Material type: TextTextSeries: Micro and nano technologies seriesPublication details: Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2011.Description: 1 online resource (1 v.)ISBN:
  • 9781437778175 (electronic bk.)
  • 1437778178 (electronic bk.)
Subject(s): LOC classification:
  • TK7871.15.F5 D67 2011
Contents:
Integration and applications -- Routes to thick films -- Thick film deposition techniques -- Microstructure-property relationships -- Pattering and structuring -- Houston, we have a problem: Thick film troubleshooting -- Recipes and techniques.
Summary: The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups. Written by a single author, this book provides a clear, coherently-written guide to this important emerging technology. Covers materials, fabrication and applications in one book.
Tags from this library: No tags from this library for this title. Log in to add tags.
Star ratings
    Average rating: 0.0 (0 votes)
Holdings
Item type Current library Call number Copy number Status Date due Barcode
General Books General Books CUTN Central Library Medicine, Technology & Management 621.3815 (Browse shelf(Opens below)) 1 Available 7538

Description based on print version record.

Integration and applications -- Routes to thick films -- Thick film deposition techniques -- Microstructure-property relationships -- Pattering and structuring -- Houston, we have a problem: Thick film troubleshooting -- Recipes and techniques.

Online version restricted to NUS staff and students only through NUSNET.

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups. Written by a single author, this book provides a clear, coherently-written guide to this important emerging technology. Covers materials, fabrication and applications in one book.

System requirements: Internet connectivity; World Wide Web browser.

Mode of access: World Wide Web.

There are no comments on this title.

to post a comment.

Powered by Koha