Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

By:

Madou, Marc J

Material type: Text

TextPublication details: Boca Raton, FL : CRC Press, c2012.Edition: 3rd edDescription: 3 v. : ill. (some col.) ; 29 cmISBN:

9781420055115 (v. 1)
1420055119 (v. 1)
9781420055191 (v. 2)
1420055194 (v. 2)
9781420055160 (v. 3)
142005516X (v. 3)

Other title:

Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology

Subject(s):

DDC classification:

620/.5 23

LOC classification:

TK7875 .M33 2012

Other classification:

TEC027000 | TEC008070 | SCI077000

Online resources:

Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).

Contents:

v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.

Summary: "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--Summary: "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
General Books	CUTN Central Library Medicine, Technology & Management	620/.5 (Browse shelf(Opens below))	1	Available		10432

Includes bibliographical references and index.

"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--

"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--

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