000			01578pam a2200325 a 4500
003			CUTN
005			20171103172223.0
008			050216s2006 enka b 001 0 eng
020			_a008044640X (v.1 : hbk.)
020			_a9780080446394 (v.2 :hbk.)
020			_a0080446396 (v.2 : hbk.)
082	0	4	_a621.381 _222 _bMAC
100	1		_aMachlin, E. S.
245	1	0	_aMaterials science in microelectronics / _cE.S. Machlin.
250			_a2nd ed.
260			_aOxford : _bElsevier, _c2006.
300			_a2 v. : _bill. ; _c24 cm.
500			_aPrevious ed.: Croton-on-Hudson, N.Y. : Giro Press, 1995.
500			_aThe subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: * Electrical properties* Magnetic properties* Optical properties* Mechanical properties* Mass transport properties* Interface and junction properties* Defects and properties
505	0		_av. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films.
650		0	_aThin films
650		0	_aMaterials science.
650		0	_aMicroelectronics.
942			_2ddc _cBOOKS
504			_aIncludes bibliographical references and index.
650		0	_xMaterials.
948			_escp
999			_c23754 _d23754