TY  - BOOK
AU  - Eranna,G.
AU  - 
TI  - Crystal growth and evaluation of silicon for VLSI and ULSI
SN  - 9781482232820
U1  - 661.068 23
PY  - 2015///
PB  - CRC Press, 
KW  - Silicon crystals
KW  - Crystal growth
KW  - Integrated circuits
KW  - Electric properties
KW  - Very large scale integration
KW  - Ultra large scale integration
N1  - "A Chapman & Hall book."; Includes bibliographical references and index; 1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers; Access restricted to subscribing institutions
N2  - Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges
UR  - https://go.oreilly.com/university-of-glasgow/library/view/-/9781482232813/?ar
ER  -