000			02597cam a2200493 i 4500
003			OCoLC
005			20251022173422.0
008			141125s2015 flua ob 001 0 eng d
020			_a9781482232820
020			_a1482232820
020			_a9780429068393
020			_a0429068395
020			_a9781322637693
020			_a1322637695
020			_z9781482232813
020			_z9781138034198
041			_aEnglish
049			_aMAIN
072		7	_aTEC _x009010 _2bisacsh
082	0	4	_a661.068 _223 _bERA
100	1		_aEranna, G.,
100	1		_eauthor.
245	1	0	_aCrystal growth and evaluation of silicon for VLSI and ULSI / _cGolla Eranna.
260			_bCRC Press, _c2015.
300			_axvii, 411 pages : _billustrations.
500			_a"A Chapman & Hall book."
504			_aIncludes bibliographical references and index.
505	0		_a1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.
506			_aAccess restricted to subscribing institutions.
520			_aSilicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.
650		0	_aSilicon crystals.
650		0	_aSilicon crystals
650		0	_aCrystal growth.
650		0	_aIntegrated circuits
650		0	_aIntegrated circuits
650		0	_xElectric properties.
650		0	_xVery large scale integration.
650		0	_xUltra large scale integration.
776	0	8	_iPrint version: _aEranna, G. _tCrystal growth and evaluation of silicon for VLSI and ULSI. _dBoca Raton, FL : CRC Press : Taylor & Francis Group, 2015 _z9781482232813 _w(OCoLC)902838097.
856	4	0	_uhttps://go.oreilly.com/university-of-glasgow/library/view/-/9781482232813/?ar
856	4	0	_zConnect to resource
907			_a.b44461689
942			_2ddc _cBOOKS
999			_c46027 _d46027