Crystal growth and evaluation of silicon for VLSI and ULSI /
Eranna, G.,
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna. - CRC Press, 2015. - xvii, 411 pages : illustrations.
"A Chapman & Hall book."
Includes bibliographical references and index.
1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.
Access restricted to subscribing institutions.
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.
9781482232820 1482232820 9780429068393 0429068395 9781322637693 1322637695
Silicon crystals.
Silicon crystals
Crystal growth.
Integrated circuits
Integrated circuits--Electric properties.--Very large scale integration.--Ultra large scale integration.
661.068 / ERA
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna. - CRC Press, 2015. - xvii, 411 pages : illustrations.
"A Chapman & Hall book."
Includes bibliographical references and index.
1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.
Access restricted to subscribing institutions.
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.
9781482232820 1482232820 9780429068393 0429068395 9781322637693 1322637695
Silicon crystals.
Silicon crystals
Crystal growth.
Integrated circuits
Integrated circuits--Electric properties.--Very large scale integration.--Ultra large scale integration.
661.068 / ERA