MARC details
| 000 -LEADER |
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| fixed length control field |
02597cam a2200493 i 4500 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
OCoLC |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20251022173422.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
141125s2015 flua ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9781482232820 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
1482232820 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9780429068393 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
0429068395 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9781322637693 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1322637695 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| Cancelled/invalid ISBN |
9781482232813 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Cancelled/invalid ISBN |
9781138034198 |
| 041 ## - LANGUAGE CODE |
|---|
| Language |
English |
| 049 ## - LOCAL HOLDINGS (OCLC) |
|---|
| Holding library |
MAIN |
| 072 #7 - SUBJECT CATEGORY CODE |
|---|
| Subject category code |
TEC |
| Subject category code subdivision |
009010 |
| Source |
bisacsh |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
661.068 |
| Edition number |
23 |
| Item number |
ERA |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Eranna, G., |
| 245 10 - TITLE STATEMENT |
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| Title |
Crystal growth and evaluation of silicon for VLSI and ULSI / |
| Statement of responsibility, etc |
Golla Eranna. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Name of publisher, distributor, etc |
CRC Press, |
| Date of publication, distribution, etc |
2015. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvii, 411 pages : |
| Other physical details |
illustrations. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
"A Chapman & Hall book." |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Contents |
1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Silicon crystals. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Silicon crystals |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Crystal growth. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Integrated circuits |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Integrated circuits |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://go.oreilly.com/university-of-glasgow/library/view/-/9781482232813/?ar">https://go.oreilly.com/university-of-glasgow/library/view/-/9781482232813/?ar</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
General Books |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Relator term |
author. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE |
|---|
| Terms governing access |
Access restricted to subscribing institutions. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| General subdivision |
Electric properties. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| General subdivision |
Very large scale integration. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| General subdivision |
Ultra large scale integration. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Display text |
Print version: |
| Main entry heading |
Eranna, G. |
| Title |
Crystal growth and evaluation of silicon for VLSI and ULSI. |
| Place, publisher, and date of publication |
Boca Raton, FL : CRC Press : Taylor & Francis Group, 2015 |
| International Standard Book Number |
9781482232813 |
| Record control number |
(OCoLC)902838097. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Public note |
Connect to resource |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b44461689 |
