Materials science in microelectronics /
Machlin, E. S.
Materials science in microelectronics / E.S. Machlin. - 2nd ed. - Oxford : Elsevier, 2006. - 2 v. : ill. ; 24 cm.
Previous ed.: Croton-on-Hudson, N.Y. : Giro Press, 1995. The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: * Electrical properties* Magnetic properties* Optical properties* Mechanical properties* Mass transport properties* Interface and junction properties* Defects and properties
Includes bibliographical references and index.
v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films.
008044640X (v.1 : hbk.) 9780080446394 (v.2 :hbk.) 0080446396 (v.2 : hbk.)
Thin films
Materials science.
Microelectronics.--Materials.
621.381 / MAC
Materials science in microelectronics / E.S. Machlin. - 2nd ed. - Oxford : Elsevier, 2006. - 2 v. : ill. ; 24 cm.
Previous ed.: Croton-on-Hudson, N.Y. : Giro Press, 1995. The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: * Electrical properties* Magnetic properties* Optical properties* Mechanical properties* Mass transport properties* Interface and junction properties* Defects and properties
Includes bibliographical references and index.
v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films.
008044640X (v.1 : hbk.) 9780080446394 (v.2 :hbk.) 0080446396 (v.2 : hbk.)
Thin films
Materials science.
Microelectronics.--Materials.
621.381 / MAC