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Yamada, I.

Materials processing by cluster ion beams : history, technology, and applications / Isao Yamada. - Boca Raton, FL : CRC Press, 2016 - xv, 244 pages ; 24 cm

Includes bibliographical references and index.

Ion beam technology : overview and history
History and milestones of cluster beam development
Development of cluster beam sources for solid materials
Gas cluster ion beam equipment
Cluster ion-solid surface interaction kinetics
Cluster ion beam sputtering
Cluster ion implantation
Cluster ion beam-assisted deposition
Applications
Conclusions.

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book: offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs; Read more...

ISBN: 9781498711753 (hardcover : alk. paper)

Subjects--Topical Terms:
Ion bombardment.
Ion implantation.
Materials--Effect of radiation on.

Dewey Class. No.: 620.1101530416 / YAM