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Materials processing by cluster ion beams : history, technology, and applications / Isao Yamada.

By: Material type: TextTextLanguage: English Publication details: Boca Raton, FL : CRC Press, 2016Description: xv, 244 pages ; 24 cmISBN:
  • 9781498711753 (hardcover : alk. paper)
Subject(s): DDC classification:
  • 620.1101530416 23 YAM
Contents:
Ion beam technology : overview and history History and milestones of cluster beam development Development of cluster beam sources for solid materials Gas cluster ion beam equipment Cluster ion-solid surface interaction kinetics Cluster ion beam sputtering Cluster ion implantation Cluster ion beam-assisted deposition Applications Conclusions.
Summary: Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book: offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs; Read more...
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Item type Current library Collection Call number Status Date due Barcode
General Books General Books CUTN Central Library Medicine, Technology & Management Non-fiction 620.1101530416 YAM (Browse shelf(Opens below)) Available 36804

Ion beam technology : overview and history
History and milestones of cluster beam development
Development of cluster beam sources for solid materials
Gas cluster ion beam equipment
Cluster ion-solid surface interaction kinetics
Cluster ion beam sputtering
Cluster ion implantation
Cluster ion beam-assisted deposition
Applications
Conclusions.

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book: offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs; Read more...

Includes bibliographical references and index.

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