Fundamentals of Microfabrication and Nanotechnology:
Fundamentals of Microfabrication and Nanotechnology: Solid-State Physics, Fluidics, and Analytical Techniques in Micro-and Nanotechnology /
Marc J. Madou.
- 3rd ed.
- Boca Raton, Fla : CRC Press, c2012.
- xiii, 636 p; ill. ; 29 cm.
vol. 1-- Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- vol. 2 Manufacturing techniques for microfabrication and nanotechnology -- vol. 3 From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications.
9781420055115 (hbk.) (vol.1) 1420055119 (hbk.) (vol.1) 9781420055191 (hbk.) (vol.2) 1420055194 (hbk.) (vol.2) 9781420055160 (hbk.) (vol.3) 142005516X (hbk.) (vol.3)
Microelectromechanical systems.
Nanotechnology.
Biotechnology.
620.5
vol. 1-- Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- vol. 2 Manufacturing techniques for microfabrication and nanotechnology -- vol. 3 From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications.
9781420055115 (hbk.) (vol.1) 1420055119 (hbk.) (vol.1) 9781420055191 (hbk.) (vol.2) 1420055194 (hbk.) (vol.2) 9781420055160 (hbk.) (vol.3) 142005516X (hbk.) (vol.3)
Microelectromechanical systems.
Nanotechnology.
Biotechnology.
620.5