Fundamentals of Microfabrication and Nanotechnology: Solid-State Physics, Fluidics, and Analytical Techniques in Micro-and Nanotechnology / Marc J. Madou.
Material type:
TextPublication details: Boca Raton, Fla : CRC Press, c2012.Edition: 3rd edDescription: xiii, 636 p; ill. ; 29 cmISBN: - 9781420055115 (hbk.) (vol.1)
- 1420055119 (hbk.) (vol.1)
- 9781420055191 (hbk.) (vol.2)
- 1420055194 (hbk.) (vol.2)
- 9781420055160 (hbk.) (vol.3)
- 142005516X (hbk.) (vol.3)
- 620.5
Contents:
Manufacturing Techniques and Applications.
| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
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General Books
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CUTN Central Library Medicine, Technology & Management | 620.5 (Browse shelf(Opens below)) | 1 | Available | 10431 |
vol. 1-- Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- vol. 2 Manufacturing techniques for microfabrication and nanotechnology -- vol. 3 From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications.
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