Fundamentals of Microfabrication and Nanotechnology: Solid-State Physics, Fluidics, and Analytical Techniques in Micro-and Nanotechnology / Marc J. Madou.

Contributor(s): Material type: TextTextPublication details: Boca Raton, Fla : CRC Press, c2012.Edition: 3rd edDescription: xiii, 636 p; ill. ; 29 cmISBN:
  • 9781420055115 (hbk.) (vol.1)
  • 1420055119 (hbk.) (vol.1)
  • 9781420055191 (hbk.) (vol.2)
  • 1420055194 (hbk.) (vol.2)
  • 9781420055160 (hbk.) (vol.3)
  • 142005516X (hbk.) (vol.3)
Subject(s): DDC classification:
  • 620.5
Contents:
Manufacturing Techniques and Applications.
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
General Books General Books CUTN Central Library Medicine, Technology & Management 620.5 (Browse shelf(Opens below)) 1 Available 10431

vol. 1-- Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- vol. 2 Manufacturing techniques for microfabrication and nanotechnology -- vol. 3 From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications.

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