Fundamentals of microfabrication and nanotechnology / (Record no. 6684)

MARC details
000 -LEADER
fixed length control field 02996cam a22004574a 4500
001 - ACCESSION NUMBER
control field 10432
003 - CONTROL NUMBER IDENTIFIER
control field CUTN
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20130622110000.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 110519s2012 flua b 001 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2011014406
Canceled/invalid LC control number 2011014404
-- 2011014405
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781420055115 (v. 1)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1420055119 (v. 1)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781420055191 (v. 2)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1420055194 (v. 2)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781420055160 (v. 3)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 142005516X (v. 3)
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)ocn727047810
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency YDX
-- YDXCP
-- CDX
-- COO
-- MYPMP
-- DLC
042 ## - AUTHENTICATION CODE
Authentication code pcc
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7875
Item number .M33 2012
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 620/.5
Edition number 23
084 ## - OTHER CLASSIFICATION NUMBER
Classification number TEC027000
-- TEC008070
-- SCI077000
Source of number bisacsh
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Madou, Marc J.
Locally assigned cutter number (author) MAD
245 10 - TITLE STATEMENT
Title Fundamentals of microfabrication and nanotechnology /
Statement of responsibility, etc Marc J. Madou.
246 30 - VARYING FORM OF TITLE
Title proper/short title Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
250 ## - EDITION STATEMENT
Edition statement 3rd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Boca Raton, FL :
Name of publisher, distributor, etc CRC Press,
Date of publication, distribution, etc c2012.
300 ## - PHYSICAL DESCRIPTION
Extent 3 v. :
Other physical details ill. (some col.) ;
Dimensions 29 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
520 ## - SUMMARY, ETC.
Summary, etc "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
520 ## - SUMMARY, ETC.
Summary, etc "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microelectromechanical systems.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Nanoelectromechanical systems.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microfluidics.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Solid-state physics.
856 ## - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486">http://pda.library.cornell.edu/coutts/pod.cgi?CouttsID=cou7021486</a>
Public note Click to ask Cornell University Library to RUSH purchase. We will contact you by email when it arrives (typically within a week).
906 ## - LOCAL DATA ELEMENT F, LDF (RLIN)
a 7
b cbc
c orignew
d 1
e ecip
f 20
g y-gencatlg
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Dewey Decimal Classification
Koha item type General Books
Holdings
Date last seen Total Checkouts Full call number Barcode Copy number Price effective from Koha item type Lost status Source of classification or shelving scheme Damaged status Not for loan Withdrawn status Home library Current library Shelving location Date acquired
22/06/2013   620/.5 10432 1 22/06/2013 General Books   Dewey Decimal Classification       CUTN Central Library CUTN Central Library Medicine, Technology & Management 22/06/2013

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