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Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna.

By: Material type: TextLanguage: English Publication details: CRC Press, 2015.Description: xvii, 411 pages : illustrationsISBN:
  • 9781482232820
  • 1482232820
  • 9780429068393
  • 0429068395
  • 9781322637693
  • 1322637695
Subject(s): Additional physical formats: Print version:: Crystal growth and evaluation of silicon for VLSI and ULSI.DDC classification:
  • 661.068 23 ERA
Online resources:
Contents:
1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.
Summary: Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.
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Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
General Books CUTN Central Library Medicine, Technology & Management Non-fiction 661.068 ERA (Browse shelf(Opens below)) Available 54608

"A Chapman & Hall book."

Includes bibliographical references and index.

1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.

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Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.

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