Fundamentals of microfabrication and nanotechnology / Marc J. Madou. by
Edition: 3rd ed.
Material type: Text; Format:
; Literary form:
Publication details: Boca Raton, FL : CRC Press, c2012
- Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Availability: Items available for loan: CUTN Central Library (1)Call number: 620/.5.