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1.
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Ceramic thick films for MEMS and microdevices [electronic resource] / Robert A. Dorey. by Series: Micro and nano technologies series
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publication details: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2011
Availability: Items available for loan: CUTN Central Library (1)Call number: 621.3815.

2.
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Handbook of silicon based MEMS [electronic resource] : materials & technologies / by Veikko Lindroos ... [et al.]. by
Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction
Publication details: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2010
Availability: Items available for loan: CUTN Central Library (1)Call number: 621.381.

3.
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Fundamentals of Microfabrication and Nanotechnology: Solid-State Physics, Fluidics, and Analytical Techniques in Micro-and Nanotechnology / Marc J. Madou. by
Edition: 3rd ed.
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Boca Raton, Fla : CRC Press, c2012
Availability: Items available for loan: CUTN Central Library (1)Call number: 620.5.

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Fundamentals of microfabrication and nanotechnology / Marc J. Madou. by
Edition: 3rd ed.
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Boca Raton, FL : CRC Press, c2012
Other title:
  • Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Availability: Items available for loan: CUTN Central Library (1)Call number: 620/.5.

5.
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Micro- and nano-scale sensors and transducers / Ezzat G. Bakhoum. by
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: Boca Raton CRC Press 2015
Availability: Items available for loan: CUTN Central Library (1)Call number: 629.8 BAK.